Application: Vacuum transport robots


As applications for clean/vacuum robots become more diverse, Rigaku's rotary feedthrough units are con­stantly being designed to satisfy customer specifications. Thanks to Rigaku's advanced technologies, the center deviation has been reduced to support positioning accuracy for large-size Flat Panel Display (FPD) boards and semiconductor wafers. Our products also satisfy diverse customer needs such as those with pressure differential seals or bellows seals (linear reciprocating motion).

Transport Robot

Vacuum Transport Robot

Application detail