High-resolution X-ray diffraction is a versatile and powerful tool in semiconductor materials and devices. Quick and non-destructive characterization of thickness, composition, quality, orientation, lattice strain, etc. are possible by XRD. This webinar will cover different high-resolution optics available for the SmartLab diffractometer for the basic and sophisticated characterization of epitaxial layers. Various high-resolution techniques such as rocking curve, reciprocal space map etc. will be discussed.