AppNote XRD2026: 通过广域倒易空间图 对面内各向异性基底上的外延膜进行评估
导言
为了制作在特定晶体取向下生长的外延膜,使用m面蓝宝石基底、Si110基底和带图案晶圆等面内各向异性基底。对于这些材料,评估其外延膜的晶体取向和结晶性与基底取向的关联非常重要。广域倒易空间图能够获得倒易空间内广范围的强度分布,有助于全面了解外延膜的晶体取向、取向性和结晶性。
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