Coatings

Thickness and composition of thin-films

Coatings

Every aspect of modern life benefits from coating or thin film technology. Whether a barrier layer film in an integrated circuit chip or a conversion coating on an aluminum beverage can, X-ray analytical techniques are integral to both R&D development, production process control and quality assurance. X-ray fluorescence (XRF) can determine the thickness and elemental composition of metallic coatings. Commonly employed in the semiconductor manufacturing process as a metrology tool, X-ray reflectometry (XRR) is used to measure layer thicknesses in a multi-layer stack of coatings and also can characterize other coating properties like roughness and interlayer diffusion. Emerging as a leading enabler for nano technology research, X-ray diffraction (XRD) and associated techniques are employed to examine the nature of the molecular structure of films. Rigaku technology and experience provide a variety of non-destructive analytical solutions for coating and thin film measurements.

Application bytes on this topic: 

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Systems: 
NEX QC   NEX QC
Low-cost EDXRF elemental analyzer measures Na to U in solids, liquids, powders and thin-films
  NEX CG   NEX CG
High-performance, Cartesian-geometry EDXRF elemental analyzer measures Na to U in solids, liquids, powders and thin-films
  Mini-Z Series   Mini-Z Series
Tube below, single element WDXRF analyzer for quality control applications
MiniFlex   MiniFlex
New 6th-generation general purpose benchtop XRD system for phase i.d and phase quantification
  Ultima IV   Ultima IV
High-performance, multi-purpose XRD system for applications ranging from R&D to quality control
  SmartLab   SmartLab
Advanced state-of-the-art high-resolution XRD system powered by Guidance expert system software
Supermini   Supermini200
Benchtop tube below sequential WDXRF spectrometer analyzes F through U in solids, liquids and powders
  ZSX Primus   ZSX Primus
High power, tube below, sequential WDXRF spectrometer with mapping and superior light element performance
  ZSX Primus II   ZSX Primus II
High power, tube above, sequential WDXRF spectrometer with mapping and superior light element performance