Microdiffraction

XRD analysis of small samples or areas, including mapping

X-ray diffraction (XRD) analysis performed on small samples or small areas of large samples is commonly referred to as microdiffraction. Considered the technique of choice when samples are too small for the optics and accuracy of conventional diffraction instrumentation, the method employs a micro X-ray beam so that diffraction characteristics can be mapped as a function of sample position. With the ability to accurately and precisely position a small X-ray beam on a sample surface, the information can be plotted as a diffraction function map (DFM). Diffraction data can contain information about compound identification, crystallite orientation (texture), stress, crystallinity, and crystallite size. The field of microdiffraction is rapidly growing in materials research and fabrication because smaller domains now affect product yield and reliability. Applications for microdiffraction analysis include: test pads on patterned wafers, compound libraries formed by combinatorial chemistry, inclusions on geological specimens, failure analysis of metal or plastic components, and quality control (QC) in manufacturing.

Systems
		RAPID II Curved imaging plate (IP) XRD system features an extremely large aperture and a choice of rotating anode or sealed tube X-ray sources				MFM310 Process XRR, XRF, and XRD metrology tool for patterned wafers; up to 300 mm wafers