AppNote B-XRD2023: 使用二维探测器通过掠入射广角X 射线散射法对有机薄膜进行晶相识别
导言
外延薄膜的晶体缺陷是阻碍实现高性能半导体器件的因素之一。外延薄膜中可能存在从单晶基底承继过来的晶体缺陷，因此在成膜前评估单晶基底的晶粒和晶体缺陷非常重要。X射线形貌法是一种可以直观观察样品晶体缺陷分布的方法。结合使用全自动多功能X射线衍射仪SmartLab和高灵敏度高分辨率X射线相机XTOP，可以拍摄出如同使用专用设备测量的高分辨率形貌图。
XRD products from Rigaku
Advanced state-of-the-art high-resolution XRD system powered by Guidance expert system software
New 6th-generation general purpose benchtop XRD system for phase i.d and phase quantification
Laboratory micro-spot XRD residual stress analysis with both iso- and side-inclination methods
2D X-ray detector with latest semiconductor technology designed for home lab diffractometers