High-sensitivity micro-spot elemental analysis using a WDXRF spectrometer equipped with a polycapillary lens
Yasujiro Yamada
Winter 2010, Volume 26, No. 1
There is growing demand for high precision and sensitivity micro-spot elemental analysis of microelectronic components. EPMA (electron probe micro analyzer) and EDXRF (energy-dispersive X-ray fluorescence)...