High-throughput, high-resolution X-ray topography imaging system: XRTmicron
The XRTmicron is a topography measurement system which can reduce measurement time by one order of magnitude compared to previous systems by using a new...
The XRTmicron is a topography measurement system which can reduce measurement time by one order of magnitude compared to previous systems by using a new...
X-ray topography is a powerful technique for evaluating crystal defects such as dislocations, stacking faults, scratches, and so on. High–performance electronics devices such as microprocessors...
TXRF spectrometers are widely used as evaluation instruments for measuring contamination in the semiconductor fabrication process. This is mainly because the TXRF technique allows non-destructive...
For more than 50 years, X-ray topography (XRT) has been an indispensable industrial and research tool for crystal growth of functional materials, since crystalline defects...
Total Reflection X-ray Fluorescence (TXRF) analysis is a non-destructive and surface-sensitive analysis method using X-rays, in which incident X-rays are irradiated on a sample at...
One of the major technical challenges of this decade are energy efficient technologies, which is among others, comparable in its importance to Artificial Intelligence, 5G...
Abstract
Rigaku launched a high-speed X-ray topography system with the improved throughput of 10–20 wafers/hour (3–6 min/wafer). High-speed image acquisition is achieved using an uncollimated...