X-ray fluorescence analysis is well-known as a non-destructive elemental analysis method. Sample preparation for the XRF technique can be performed quickly and easily, especially for solid samples. A wavelength dispersive type X-ray fluorescence spectrometer (WDXRF) has highly precise performance, so WDXRF is used for sample analysis in process and production control in many manufacturing industries. A sequential type WDXRF, which can analyze from oxygen to uranium using default optical configurations, is used for a variety of materials such as in R&D and acceptance inspections, etc. A high-performance WDXRF equipped with a sample stage and a sample observation system can perform small point analysis and area mapping. This function can apply to the inspection for abnormalities and the analysis of inclusions or inhomogeneity in manufacturing products. Thus, WDXRF has expanded its application field beyond conventional elemental analysis.
Rigaku’s ZSX Primus family of WDXRF spectrometers is composed of the following instruments: ZSX Primus IV, a high-performance XRF with tube-above optics; ZSX Primus, high-performance with tube-below optics; and ZSX Primus III+, standard XRF with tube-above optics. Because all of these spectrometers use a sample holder system during measurement, sample specimens must be smaller than the dimensions of a sample holder. There are, however, numerous demands for WDXRF analysis to be performed on samples in their original product size without any processing. In order to resolve these sample size limitations, the new ZSX Primus 400 has been developed based on the earlier ZSX400 and released as a member of the ZSX Primus family, incorporating many of the latest functions of ZSX Primus IV.