Process XRR, XRF, and XRD metrology tool for blanket and patterned wafers; up to 300 mm wafers
Advanced state-of-the-art high-resolution XRD system powered by Guidance expert system software
This versatile X-ray metrology tool enables high-throughput measurements on blanket wafers ranging from ultra-thin single-layer films to multilayer stacks for process development and film quality control.
In TG-FTIR, gases evolved by volatilization or thermal decomposition are qualitatively analyzed, which allows you to track changes in the generated amount along with the temperature change.
New 6th-generation general purpose benchtop XRD system for phase i.d and phase quantification