Trace elemental surface contamination metrology by TXRF; up to 200 mm wafers.
High-resolution benchtop microtomography of large samples
Trace elemental surface contamination metrology by TXRF; up to 300 mm wafers
Ultra-trace elemental surface contamination metrology by TXRF with VPD capability; up to 300 mm wafers
Advanced state-of-the-art high-resolution XRD system powered by Guidance expert system software
Ultra-high resolution nanotomography using parallel beam geometry