Advanced state-of-the-art high-resolution XRD system powered by Guidance expert system software
Trace elemental surface contamination metrology by TXRF; up to 200 mm wafers.
Trace elemental surface contamination metrology by TXRF; up to 300 mm wafers
Ultra-trace elemental surface contamination metrology by TXRF with VPD capability; up to 300 mm wafers
A fast, high-resolution laboratory X-ray topography system for non-destructive dislocation imaging