A bespoke, extremely high-flux diffractometer with custom enclosure and the flexibility to utilize both ports of the rotating anode X-ray source.
Small and wide angle X-ray scattering instrument designed for nano-structure analyses
In-line, simultaneous WDXRF spectrometer for wafer metal film metrology; up to 300 mm wafers
Simultaneous WDXRF spectrometer for wafer metal film metrology; up to 200 mm wafers
Sequential WDXRF spectrometer for elemental analysis and thin-film metrology of large and/or heavy samples
Process XRR, XRF, and XRD metrology tool for blanket and patterned wafers; up to 300 mm wafers
Trace elemental surface contamination metrology by TXRF; up to 200 mm wafers.
High-resolution benchtop microtomography of large samples