High-performance, Cartesian-geometry EDXRF elemental analyzers for measuringes Na to U in solids, liquids, powders and thin films
300 kV microcomputerized directional industrial X-ray system
Small, light weight non-destructive testing X-ray generator
250 kV microcomputerized directional industrial X-ray system
In-line, simultaneous WDXRF spectrometer for wafer metal film metrology; up to 300 mm wafers
Simultaneous WDXRF spectrometer for wafer metal film metrology; up to 200 mm wafers
Sequential WDXRF spectrometer for elemental analysis and thin-film metrology of large and/or heavy samples
Process XRR, XRF, and XRD metrology tool for blanket and patterned wafers; up to 300 mm wafers
Trace elemental surface contamination metrology by TXRF; up to 200 mm wafers.
High-resolution benchtop microtomography of large samples