From Si on plastic to semiconductor wafer stacks
Every aspect of modern life benefits from coating or thin film technology. Whether a barrier layer film in an integrated circuit chip or a conversion coating on an aluminum beverage can, X-ray analytical techniques are integral to both R&D development, production process control and quality assurance. X-ray fluorescence (XRF) can determine the thickness and elemental composition of metallic coatings. Commonly employed in the semiconductor manufacturing process as a metrology tool, X-ray reflectometry (XRR) is used to measure layer thicknesses in a multi-layer stack of coatings and also can characterize other coating properties like roughness and interlayer diffusion. Emerging as a leading enabler for nano-technology research, X-ray diffraction (XRD) and associated techniques are employed to examine the nature of the molecular structure of films. Rigaku technology and experience provide a variety of non-destructive analytical solutions for coating and thin film measurements.
Application Notes
The following application notes are relevant to this industryXRD
EDXRF
Process
Total reflection XRF (TXRF)
Rigaku recommends the following systems:
WDXRF
El espectrómetro secuencial WDXRF con tubo inferior de sobremesa, analiza de O a U en sólidos, líquidos y polvos.
Espectrómetro secuencial WDXRF de alta potencia, de tubo superior con nuevo software de sistema experto Guidance (Guía) ZSX.
High-power, tube-below, sequential WDXRF spectrometer with new ZSX Guidance expert system software
XRD
Nuevo sistema XRD de sobremesa de uso general de sexta generación para identificación y cuantificación de fase
Sistema avanzado de rayos XRD de alta resolución y tecnología de punta, impulsado por el software del sistema experto Guidance
EDXRF
El analizador elemental EDXRF de bajo costo mide de Na a U en sólidos, líquidos, polvos y películas delgadas
El analizador elemental EDXRF de rendimiento mide de Na a U en sólidos, líquidos, polvos y películas delgadas
El analizador elemental EDXRF de geometría cartesiana de alto rendimiento mide de Na a U en sólidos, líquidos, polvos y películas delgadas
X-ray CT
Process
Analizadores de escaneo de proceso de elementos múltiples, para aplicaciones de tira o bobina.