High-resolution benchtop microtomography of large samples
New 6th-generation general purpose benchtop XRD system for phase i.d and phase quantification
Highly versatile multipurpose X-ray diffractometer with built-in intelligent guidance
High-speed, stationary sample microtomography of large samples
Ultra-high resolution nanotomography using parallel beam geometry
Process XRR, XRF, and XRD metrology tool for blanket and patterned wafers; up to 300 mm wafers
Trace elemental surface contamination metrology by TXRF; up to 200 mm wafers.
Trace elemental surface contamination metrology by TXRF; up to 300 mm wafers