Performance EDXRF elemental analyzer measures Na to U in solids, liquids, powders and thin-films
60 kV EDXRF system featuring QuantEZ software and optional standardless analysis
EDXRF spectrometer with powerful Windows® software and optional FP.
High-performance, Cartesian-geometry EDXRF elemental analyzers for measuringes Na to U in solids, liquids, powders and thin films
In-line, simultaneous WDXRF spectrometer for wafer metal film metrology; up to 300 mm wafers
Simultaneous WDXRF spectrometer for wafer metal film metrology; up to 200 mm wafers
Sequential WDXRF spectrometer for elemental analysis and thin-film metrology of large and/or heavy samples
XRF and optical metrology tool for blanket and patterned wafers; up to 300 mm wafers
Advanced state-of-the-art high-resolution XRD system powered by Guidance expert system software
This versatile X-ray metrology tool enables high-throughput measurements on blanket wafers ranging from ultra-thin single-layer films to multilayer stacks for process development and film quality control.