Process XRR, XRF, and XRD metrology tool for blanket and patterned wafers; up to 300 mm wafers
Trace elemental surface contamination metrology by TXRF; up to 200 mm wafers.
High-resolution benchtop microtomography of large samples
XRF and optical metrology tool for blanket and patterned wafers; up to 300 mm wafers
Our most popular diffractometer for Chemical Crystallography and Mineralogy, configured with either single or dual microfocus sealed tube X-ray sources and an extremely low noise direct X-ray detection detector.
Trace elemental surface contamination metrology by TXRF; up to 300 mm wafers
Ultra-trace elemental surface contamination metrology by TXRF with VPD capability; up to 300 mm wafers
A bespoke, extremely high-flux diffractometer with custom enclosure and the flexibility to utilize both ports of the rotating anode X-ray source.
Advanced state-of-the-art high-resolution XRD system powered by Guidance expert system software