High-resolution benchtop microtomography of large samples
High-speed, stationary sample microtomography of large samples
Ultra-high resolution nanotomography using parallel beam geometry
EDXRF multi-element process analyzer; analyze aluminum (Al) through uranium (U)
In-line, simultaneous WDXRF spectrometer for wafer metal film metrology; up to 300 mm wafers
Simultaneous WDXRF spectrometer for wafer metal film metrology; up to 200 mm wafers
Sequential WDXRF spectrometer for elemental analysis and thin-film metrology of large and/or heavy samples
XRF and optical metrology tool for blanket and patterned wafers; up to 300 mm wafers